Three-dimensional Probe and Surface Reconstruction for Atomic Force Microscopy Using a Deconvolution Algorithm

Atomic force microscope (AFM) images often contain distortions caused by the convolution of the tip and sample surface. The offered numerical deconvolution, with the use of an inverted tip located at a constant height from the surface, noticeably differs from methods previously published and is essentially simple for a concrete practical realization. Nanometer-sized spheres were successfully used to extract the shape of the AFM square pyramidal tip by means of this algorithm. Once a deconvolution procedure was used with the reconstructed AFM tip shape, truer structures of the spherical 90 nm sized particles were obtained.